This graduate-level course will address principles of Semiconductor Processing with applications for Semiconductor Materials Engineering, Research, and Development. The materials fabrication and processing topics include preparation of silicon, III-V compounds, and dielectric thin films, including thin film deposition techniques, diffusion, ion implantation, and standard device fabrication sequences. Applications of Semiconductor Materials Engineering and Bandgap Engineering with be discussed for devices, such as LEDs, lasers, photodetectors, modulators, and high speed transistors.



Textbook (Recommended):        The Physics of Semiconductors (Kevin F. Brennan);

                       VLSI Fabrication Principles (2nd), by S.K. Ghandhi